Lead screw front support block, for KLA SP1
compatible with KLA P/N 350605, SUPPORT BALL SCR 10MM SHFT
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Lead screw rear support block, for KLA SP1
compatible with KLA P/N 349224 LEAD SCREW REAR SUPPORT BLOCK -
Main power supply in main power supply drawer, low voltages, for SP1 DLS
compatible with KLA P/N 0279265-000 FRU KIT,PWR SUPPLY,MODULAR,650W,CONFIG and KLA P/N 0056119-000 PWR SUPPLY,MODULAR,650W,CONFIG -
Main power supply in main power supply drawer, low voltages, for SP1 TBI
compatible with 0056119-000 PWR SUPPLY,MODULAR,650W,CONFIG -
X-axis motor for KLA SP1 TBI and DLS
compatible with KLA P/N 344389, STAGE X-AXIS MOTOR ASSEMBLY, SP1 and P/N 344192, MOTOR ASSY,TRANSL AXIS,SP1 -
Centering device z motor for KLA SP1 TBI and DLS
compatible with KLA P/N 341169, MOTOR ASSY,CD Z,SP1 (REV A and REV AB available) -
Photo multiplier tube for SP1
compatible with KLA P/N 0092493-001 PHOTOMULTIPLIER TUBE,SP1 -
Replacement lens in mount for spatial filter SP1 TBI and DLS normal path
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Replacement lens in mount for spatial filter SP1 TBI and DLS oblique path
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Spindle with Motor for KLA SP1 DLS & TBI compatible with KLA P/N 0048209-001 etc.
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Solid State Laser 488nm 75mW for KLA SP1-DLS with Power Supply, Conversion Kit and 3 Years Warranty
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Solid State Laser 488nm 30mW for KLA SP1-TBI with Power Supply, Conversion Kit and 3 Years Warranty
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Target toolkit for KLA SP1 TBI or DLS<br /> includes 12 targets plus one piece SP1-TK-RMC (radiometrics clamp), comes in hard case, ready for cleanroom use
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Single channel power meter kit including one single-channel power meter and one sensor, specially calibrated for KLA SP1 TBI or DLS
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Dual channel power meter kit including one dual-channel power meter and two sensor, specially calibrated for KLA SP1 TBI or DLS, for easy adjustment of the autocal pin
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Remote control for laser and laser power supply testing on a KLA SP1 TBI and DLS (set/display current and power)
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Special power sensor clamp mount for radiometric measurement on a KLA SP1 TBI and DLS. Part of our SP1-Toolkit (SP1-TK).
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Vacuum chuck for 200mm and 300mm wafer for KLA SP1
compatible with KLA P/N 0023892-000 CHUCK,200/300MM WAFER,VACUUM;SP1