KLA-Tencor SP1

We offer a variety of optics assemblies, spare parts and services for the KLA-Tencor / KT Surfscan SP1 TBI and DLS. Production and assembly is done with highest quality standards at ABSee-Laser, Germany. A warranty on those assemblies is therefor self-evident.
Are you looking for another part or need a custom-made part? Please make an inquiry.

  • Autocal Pin Assembly for KLA SP1 DLS
    compatible to KLA P/N 0060464-000 FRU,ASSY,ACAL-PIN,SP1-DLS/TQM

  • Autocal Pin Assembly for KLA SP1 TBI
    compatible to KLA P/N 0060463-000 FRU,ASSY,ACAL-PIN,SP1-TBI/TQM

  • Autocal pin (pin only!) for KLA SP1 DLS
    compatible with KLA P/N 0060464-000 FRU,ASSY,ACAL-PIN,SP1-DLS/TQM

  • Autocal Pin Mirror (Mirror only!) for KLA SP1 TBI / DLS
    compatible to KLA P/N 0041756 (fits to SP1-ACP-ASSY-TBI, compatible to KLA P/N 0060463-000 & SP1-ACP-ASSY-DLS, compatible KLA P/N 0060464-000)

  • Autocal Pin (Pin only!) for KLA SP1 TBI
    compatible to KLA P/N 0060463-000 FRU,ASSY,ACAL-PIN,SP1-TBI/TQM

  • Aligner Sensor Assembly, for KLA SP2
    compatible to KLA P/N 545074 Sensor Assy, Feature, Aligner

  • Auto Zero Dump Assembly, for KLA SP1
    compatible to KLA P/N 347353 - AUTO ZERO ASSY, OPTICS, SP1

  • BPS pin (pin only!) for KLA SP1 TBI and DLS compatible with KLA P/N 508250 BPS-Cal Pin SP1

  • Beam splitter assembly (BSC Assy.) for KLA SP1 DLS
    compatible with KLA P/N 0283214-000 FRU KIT,ASSY,BEAMSPLITTER,SP1-DLS also KLA P/N 0238712-000 and P/N 0018134-000 ASSY, BEAMSPLITTER,SP1-DLS

  • High Power Beamsplitter Assembly (BSC Assy.) for KLA SP1 DLS with enhanced lifetime compared to original part for KLA SP1 DLS
    compatible to KLA P/N 0283214-000 FRU KIT,ASSY,BEAMSPLITTER,SP1-DLS and KLA P/N 0238712-000 and P/N 0018134-000 ASSY, BEAMSPLITTER,SP1-DLS

  • Beamsplitter Assembly (BSC Assy) for KLA SP1 TBI
    compatible to KLA P/N 536091, BEAMSPLITTER ASSY,BF-DF,SP1-TBI

  • Illumination polarizer assembly (HWP Assy., Half wave plate assy.) for KLA SP1 TBI and DLS
    compatible with KLA P/N 0103687-000 SP1+ ILLUMINATION POLARIZER ASSY

  • Half wave plate / quarter wave plate assembly (HWP/QWP Assy.) for KLA SP1 TBI and DLS
    compatible with KLA P/N 0050753-000 QTR-HALF WAVE CHGR ASSY, SP1 TBI DLS

  • Isolator for KLA SP1 TBI and DLS
    compatible with KLA P/N 349437 ISOLATOR,OPTICAL,488NM,SP1. Part of Isolator assembly KLA P/N 509167 and 0351490-000 SP1 ISOLATOR ASSY. (Isolator with mouting bracket and base plate)

  • High power isolator with enhanced lifetime compared to original part for KLA SP1 DLS compatible with KLA P/N 349437 and 0351490-000 ISOLATOR,OPTICAL,488NM,SP1. Part of Isolator assembly KLA P/N 509167 SP1 ISOLATOR ASSY. (Isolator with mouting bracket and base plate)

  • Laser head for KLA SP1 DLS, manufacturer JDSU, brand new (no refurbishment or re-gas)
    compatible with KLA P/N 0278424-000 LASER ASSY,ARGON,75mW,FSB,SP1-DLS or P/N 571024 LASER ASSY, SP1-DLS

  • Laser head for KLA SP1 TBI, manufacturer JDSU, brand new (no refurbishment or re-gas) compatible with KLA P/N 0105128-000 30mW ARGON LASER ASSY or 0224471-000 ASSY,LASER,ARGON,30MW,TESTED

  • Power supply for KLA SP1 DLS laser head compatible with KLA P/N 0029941-001 PWR SUPPLY,LASER,75 MW,SP1-DLS

  • Power supply for KLA SP1 TBI laser head
    compatible with KLA P/N 168807 POWER SUPPLY 30MW for SP1-TBI

  • Lead screw for the KLA SP1 TBI or DLS 12mm
    compatible with KLA P/N 350567 SCREW,BALL,12MM DIA,2MM LEAD

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