High Power Beamsplitter Assembly (BSC Assy.) for KLA SP1 DLS with enhanced lifetime compared to original part for KLA SP1 DLS
compatible to KLA P/N 0283214-000 FRU KIT,ASSY,BEAMSPLITTER,SP1-DLS and KLA P/N 0238712-000 and P/N 0018134-000 ASSY, BEAMSPLITTER,SP1-DLS