Autocal pin (pin only!) for KLA SP2
compatible with KLA P/N 0063021-005 AUTO-CAL ASSY, SP2
We offer a variety of optics assemblies, spare parts and services for the KLA-Tencor / KT Surfscan SP2. Production and assembly is done with highest quality standards at ABSee-Laser, Germany. A warranty on those assemblies is therefor self-evident.
Are you looking for another part or need a custom-made part? Please make an inquiry.
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Aligner Sensor Assembly, for KLA SP2
compatible to KLA P/N 545074 Sensor Assy, Feature, Aligner -
Attenuator assembly (attenuator assy.) for KLA SP2
compatible with KLA P/N 0253452-000 FRU, ATTENUATOR ASSY, HALF-WAVE, EC, SP2 -
Auto Zero Dump Assembly, for KLA SP2
compatible to KLA P/N 0073447-002, AUTO-ZERO ASSY,OPTICS,SP2 -
Beam pick-off set (2 pcs.) for quad-cells for KLA SP2 (also available seperatelly)
compatible with KLA P/N 0253456-000 FRU, MIRROR, PICK-OFF, QC1, EC, SP2 and KLA P/N 0278802-000 FRU, MIRROR, PICK-OFF, QC2,EC,SP2 -
Beam position sensor board for KLA SP2 compatible with KLA P/N 375403 PCB ASSY,BEAM POS SENS,SP1+
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BPS ND filter assembly for KLA SP2
compatible with KLA P/N 0214580-001 -
Beam splitter assembly (BSC assy.) for KLA SP2
compatible with KLA P/N 0253755-000 FRU, BSC ASSY, NRMLOBL CHNL, EC, SP2 -
Chamber pressure monitoring, measures and monitors the air pressure within the scan chamber, activates interlock when FFU is bad or dying, easy to install
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Dump mirror (repair kit) for BPS path
compatible with KLA P/N 0065817-001 MIRROR, DUMP, BPS,SP1-UV -
Half-wave assembly (HWP assy.) for KLA SP2
compatible with KLA P/N 0253458-000 FRU,ROTATOR ASSY,HALF-WAVE,EC,SP2 -
Half-wave quarter-wave changer assembly (HWP QWP assy.) for KLA SP2
compatible with KLA P/N 0253453-000 FRU, CHANGER ASSY, QTRHALF-WAVE, EC, SP2 or KLA P/N 0214553-001 FRU,Changer ASSY,QTR/Half-WAVE SP2 -
Spectra Physics Vanguard Laser Head 350mW for KLA SP2
compatible with KLA P/N 0235019-000 Laser Head, UV, 355nm, 350mW, T sesam mo and KLA P/N 0113630-000 LASER HEAD, UV, 355MW, UNCOATED SESAM -
Lead screw for KLA SP2
compatible with KLA P/N 0059176-000 SCREW,BALL,12MM DIA,2MM LEAD,SP1 UV -
Lead screw front support block, for KLA SP2
compatible with KLA P/N 350605, SUPPORT BALL SCR 10MM SHFT -
Lead screw rear support block, for KLA SP2 compatible with KLA P/N 349224 LEAD SCREW REAR SUPPORT BLOCK
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Main power supply 650W, low voltages, for SP2
part of main power supply drawer KLA P/N 0094103-001, FRU,DC MODULE ASSY,PDU,SP2 -
X-axis motor for KLA SP2
compatible with KLA P/N 0102491-000, MOTOR ASSY, BALL SCREW, X-STAGE, SP2 -
Y-motor for centering device for KLA SP2
compatible with KLA P/N 0085136-002, MOTOR ASSY, CENTERING DEVICE, SP2 -
Z-axis motor for KLA SP2
compatible with KLA P/N 0145724-000, FRU,MOTOR/ENCODERASSY,Z-AXIS,SPINDLE,SP2