Normal isolator HWP of the KLA SP2
compatible with KLA P/N 0271477-000, FRU, HWP, NOR ISO, EC, SP2
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Normal isolator QWP of the KLA SP2
compatible with KLA P/N 0259856-000, FRU, QWP, NOR ISO, EC, SP2 -
Photo multiplier tube for SP2
compatible with KLA P/N 0092493-001 PHOTOMULTIPLIER TUBE,SP1 -
Spectra Physics J40 power supply with new laser diode
compatible with KLA P/N 0092416-001 POWER SUPPLY W/DIODE, UV LASER, J40 355MW -
Spatial Filter Assembly with Aperture, for L1 L2 Spatial Filter Assembly for KLA SP2
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L1A L1B Assembly of the spatial filters of the KLA SP2
compatible with KLA P/N 0259855-000 FRU,L1A,L1B, L1-L2 ASSY,EC,SP2 -
Shim kit for KLA SP2, 11 shims
compatible with KLA P/N 0028186-000 KIT, SHIM, FLAT OPT, SP2 -
Servo mirror assembly (servo-mirror assy.) for KLA SP2
compatible with KLA P/N 00253311-000 ASSY, SERVO-MIRROR, SAPPHIRE, BSS, EC, SP2 -
Spatial filter assembly (L1 L2 spatial filter assy.) for KLA SP2
compatible with KLA P/N 0108009-002 L1 L2 SPATIAL FILTER ASSY. SP2 -
Turning mirror / fold mirror assembly for KLA SP2
compatible with KLA P/N 0255764-000 FRU, OLD FOLD MIRR, 90 DEG, SP2 or KLA P/N 0253457-000, FRU,FOLD MIRR,90 DEG,INCIDENT,EC,SP2 -
Turning mirrors assembly (before spatial filter) for normal path
compatible with KLA P/N 0220037-001 SP2 Normal Channel M1/M2 Mirror